F-Theta Scan Lens-9.3µm/9.4µm
1.Singlet F-Theta Scan Lens -Input BeamΦ12mm（Wavelength:9.3µm/9.4µm）
| Maximum | EFL | Input | Scan | Center-Edge | Outer | Working | ||
| Product ID | Scan Field | Beam | Angel | Spot Size | DiaXL | Distance | ||
| XxY(mm) | Φ(mm) | (mm) | Φ(mm ) | （±o） | Φ(µm) | (mm) | (mm) | |
| SL1-9.3/9.4-50Z-12-D10 | 12X12 | Φ17 | 50 | 10 | 28 | 50-56 | Φ89X24 | 45.00 |
| SL1-9.3/9.4-52Z-35-D10 | 35X35 | Φ50 | 52 | 10 | 28 | 126-130 | Φ89X24 | 35.36 |
| SL1-9.3/9.4-75Z-50-D10 | 50X50 | Φ71 | 75 | 10 | 28 | 215-242 | Φ89X24 | 57.8 |
| SL1-9.3/9.4-100Z-70-D10 | 70X70 | Φ99 | 100 | 10 | 28 | 180-190 | Φ89X24 | 78.7 |
| SL1-9.3/9.4-150Z-110-D12 | 110X110 | Φ155 | 150 | 12 | 28 | 276-311 | Φ89X24 | 130.0 |
| SL1-9.3/9.4-200Z-140-D15 | 140X140 | Φ198 | 200 | 15 | 28 | 300-376 | Φ89X24 | 181.0 |
| SL1-9.3/9.4-250Z-175-D15 | 175X175 | Φ245 | 250 | 15 | 28 | 320-395 | Φ89X24 | 232.7 |
| SL1-9.3/9.4-300Z-210-D12 | 210X210 | Φ297 | 300 | 12 | 28 | 500-630 | Φ89X24 | 283.6 |
| SL1-9.3/9.4-360Z-250-D12 | 250X250 | Φ354 | 360 | 12 | 28 | 475-481 | Φ89X24 | 344.6 |
| SL1-9.3/9.4-433Z-300-D12 | 300X300 | Φ424 | 433 | 12 | 28 | 520-760 | Φ89X24 | 414.4 |
| SL1-9.3/9.4-480Z-350-D14 | 350X350 | Φ495 | 480 | 14 | 28 | 670-890 | Φ89X24 | 464.5 |
| SL1-9.3/9.4-573Z-430-D12 | 430X430 | Φ608 | 573 | 12 | 28 | 930-1028 | Φ89X24 | 559.0 |
| SL1-9.3/9.4-720Z-520-D12 | 520X520 | Φ735 | 720 | 12 | 28 | 1152-1382 | Φ89X24 | 729.0 |
| SL1-9.3/9.4-934Z-650-D12 | 650X650 | Φ962 | 934 | 12 | 28 | 1554-1696 | Φ89X24 | 920.0 |
| SL1-9.3/9.4-977Z-675-D12 | 675X675 | Φ990 | 977 | 12 | 28 | 1553-1696 | Φ89X24 | 974.80 |
| SL1-9.3/9.4-1191Z-770-D12 | 770X770 | Φ1089 | 1191 | 12 | 25 | 1916-2120 | Φ89X24 | 1610.0 |
| SL1-9.3/9.4-1150Z-800-D14 | 800X800 | Φ1131 | 1150 | 14 | 26.5 | 1570-1700 | Φ89X24 | 1137.42 |
2.Doublet F-Theta Scan Lens -Wavelength:9.3µm/9.4µm
| Maximum | EFL | Input | Scan | Center-Edge | Working | Outer | Screw | ||
| Product ID | Scan Field | Beam | Angel | Spot Size | Distance | DiaXL | thread | ||
| XxY(mm) | Φ(mm) | (mm) | Φ(mm ) | (±°) | Φ(µm) | (mm) | (mm) | (mm) | |
| SL2-9.3/9.4-45Z-15-D20 | 15X15 | Φ21 | 45 | 20 | 13.6 | 45-50 | 57.4 | Φ92X53 | M85X1 |
| SL2-9.3/9.4-100Z-50-D20 | 50X50 | Φ71 | 100 | 20 | 20.6 | 85-88 | 125.84 | Φ94X53 | M85X1 |
| SL2-9.3/9.4-100Z-70-D14 | 70X70 | Φ99 | 100 | 14 | 28 | 133-144 | 105.6 | Φ92X31 | M85X1 |
| SL2-9.3/9.4-150Z-105-D14 | 105X105 | Φ148 | 150 | 14 | 28 | 171-172 | 161.73 | Φ90X25 | M85X1 |
| SL2-9.3/9.4-170Z-110-D20 | 110X110 | Φ155 | 170 | 20 | 25 | 150-151 | 177.1 | Φ90X31 | M85X1 |
| SL2-9.3/9.4-200Z-140-D15 | 140X140 | Φ198 | 200 | 15 | 28.6 | 232-247 | 219.0 | Φ89X30 | M85X1 |
| SL2-9.3/9.4-250Z-175-D15 | 175X175 | Φ248 | 250 | 15 | 28.4 | 250-255 | 286.08 | Φ94X35 | M85X1 |
| SL2-9.3/9.4-300Z-170-D20 | 170X170 | Φ240 | 300 | 20 | 23 | 288-304 | 326.0 | Φ110X50 | M85X1 |
| SL2-9.3/9.4-320Z-210-D20 | 210X210 | Φ197 | 320 | 20 | 28 | 356-393 | 334.8 | Φ90X40.5 | M85X1 |
| SL2-9.3/9.4-380Z-220-D30 | 220X220 | Φ311 | 380 | 30 | 23 | 220-239 | 425.8 | Φ130X56 | M85X1 |
| SL2-9.3/9.4-360Z-250-D15 | 250X250 | Φ354 | 360 | 15 | 28 | 476-500 | 388.3 | Φ98X42 | M85X1 |
| SL2-9.3/9.4-420Z-300-D20 | 300X300 | Φ424 | 420 | 20 | 28 | 408-427 | 466.0 | Φ109X53 | M85X1 |
| SL2-9.3/9.4-490Z-350-D18 | 350X350 | Φ495 | 490 | 18 | 28 | 410-434 | 535.2 | Φ96X23 | M85X1 |
| SL2-9.3/9.4-623Z-400-D10 | 400X400 | Φ657 | 623 | 10 | 28 | 1058-1118 | 680.5 | Φ110X53 | M85X1 |
| SL2-9.3/9.4-700Z-500-D30 | 500X500 | Φ707 | 700 | 30 | 27.8 | 420-450 | 763.7 | Φ118X37 | M85X1 |